NIST - National Institute of Standards and Technology
09/02/2025 | Press release | Archived content
300 mm Wafer-Scale SiN Platform for Broadband Soliton Microcombs Compatible with Alkali Atomic References
Author Affiliations
Shao-Chien Ou,1,2 Alin O. Antohe,3 Lewis G. Carpenter,3 Gregory Moille,1,2 and Kartik Srinivasan1,2,*
1Joint Quantum Institute, NIST/University of Maryland, College Park, Maryland, USA
2Microsystems and Nanotechnology Division, National Institute of Standards and Technology, Gaithersburg, Maryland, USA
3American Institute of Manufacturing Integrated Photonics (AIM Photonics), Research Foundation SUNY, Albany, New York, USA
*Corresponding author: [email protected]
ORCID
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