Clarkson University Professor Elizabeth Podlaha-Murphy Receives Sustainability Research Award

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Elizabeth Podlaha-Murphy, a professor of chemical and biomolecular engineering at Clarkson University, has received the Semiconductor Research Corporation (SRC) Sustainable Future Award for her research on environmentally friendly semiconductor manufacturing.

The annual award recognizes researchers who thoughtfully incorporate sustainability into work that advances the semiconductor industry while conserving resources, reducing costs and moving new technologies into practical use.

Podlaha-Murphy shares the award with Jihoon Seo of Hanyang University. They were recognized for research exploring safer alternatives to some of the chemicals traditionally used to manufacture semiconductors, which are essential components in everything from smartphones and computers to cars and medical devices.

Podlaha-Murphy says corrosion inhibitors play an important role in the chemical mechanical polishing process used in semiconductor manufacturing, but some of the traditional chemicals present environmental challenges.

"The corrosion inhibitors currently used in semiconductor polishing can be toxic to the environment and difficult to break down once they reach the end of their useful life," Podlaha-Murphy said.

Working with their research team, Podlaha-Murphy and Seo explored naturally derived amino acids as a more environmentally friendly alternative.

"Benign amino acids are one possible alternative," Podlaha-Murphy says. "Our work shows they can prevent corrosion, work effectively during polishing and break down more readily. However, they are not a direct substitute. They interact differently with surfaces and are sensitive to pH, so our work can help identify the right conditions for using them."

According to SRC, this approach could lead to better wastewater outcomes while still providing the corrosion protection and surface quality needed in semiconductor manufacturing.

"It is a great honor to receive this award," Podlaha-Murphy says. "SRC funding allowed us to engage graduate students and expand undergraduate research opportunities, which generated tremendous student interest. Our team brought together expertise from several fields, while our industry partners helped keep the research grounded in practical applications."

Podlaha-Murphy joined Clarkson in 2017. Her research focuses on electrochemistry and developing more environmentally friendly processes for creating and working with materials used in small-scale devices. Her work, which reflects a longstanding focus on more sustainable materials and manufacturing processes, has been supported by the National Science Foundation, National Institutes of Health, U.S. Department of Energy, industry partners and other organizations.